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HomeSolid State PhenomenaSolid State Phenomena Vols. 57-58Observation of Vacancy Enhancement during Rapid...

Observation of Vacancy Enhancement during Rapid Thermal Annealing in Nitrogen

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Gettering and Defect Engineering in Semiconductor Technology VII

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Periodical:

Solid State Phenomena (Volumes 57-58)

Pages:

349-354

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.57-58.349

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Online since:

July 1997

Authors:

M. Jacob, P. Pichler, Heiner Ryssel, Robert J. Falster, M. Cornara, D. Gambaro, M. Olmo, M. Pagani

Keywords:

Platinum Diffusion, Point Defect, Silicon, Vacancy Generation

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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