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Design: New Material Challenge for Silicon ULSI
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Hydrogen Annealed Silicon Wafer
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Formation of Microscopic Distribution of Grown-In Defects in Czochralski Silicon Crystal
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CZ Crystal Growth Development in Super Silicon Crystal Project
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Gettering by Voids in Silicon: A Comparison with other Techniques
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Gettering in Advanced Low Temperature Processes
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Metal Gettering by Defective Regions in Carbon-Implanted Silicon
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HomeSolid State PhenomenaSolid State Phenomena Vols. 57-58Design: New Material Challenge for Silicon ULSI

Design: New Material Challenge for Silicon ULSI

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Abstract:

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Gettering and Defect Engineering in Semiconductor Technology VII

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Periodical:

Solid State Phenomena (Volumes 57-58)

Pages:

1-8

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.57-58.1

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Online since:

July 1997

Authors:

Lionel C. Kimerling

Keywords:

Cleaning Solutions, Environmental Issue, Gettering, Silicon

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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