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HomeSolid State PhenomenaSolid State Phenomena Vols. 57-58Hydrogen Annealed Silicon Wafer

Hydrogen Annealed Silicon Wafer

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Gettering and Defect Engineering in Semiconductor Technology VII

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Periodical:

Solid State Phenomena (Volumes 57-58)

Pages:

19-26

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.57-58.19

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Online since:

July 1997

Authors:

S. Nadahara, H. Kubota, S. Samata

Keywords:

Bone Mineral Density (BMD), COP, High Temperature Annealing, Hydrogen Annealing, Oxide Breakdown, Oxygen Out-Diffusion, Silicon

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Сopyright:

© 1997 Trans Tech Publications Ltd. All Rights Reserved

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