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HomeSolid State PhenomenaSolid State Phenomena Vols. 57-58CZ Crystal Growth Development in Super Silicon...

CZ Crystal Growth Development in Super Silicon Crystal Project

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Gettering and Defect Engineering in Semiconductor Technology VII

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Periodical:

Solid State Phenomena (Volumes 57-58)

Pages:

37-42

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.57-58.37

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Online since:

July 1997

Authors:

H. Yamagishi, M. Kuramoto, Y. Shiraishi, M. Machida, K. Takano, N. Takase, T. Iida, J. Matsubara, Kazuya Takada

Keywords:

Large-Diameter, Silicon, Single Crystal Growth, Super Silicon

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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