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Paper Titles
Preface
Design: New Material Challenge for Silicon ULSI
p.1
Silicon Wafer Technology: The Challenges towards the Gigabit Era
p.9
Hydrogen Annealed Silicon Wafer
p.19
Formation of Microscopic Distribution of Grown-In Defects in Czochralski Silicon Crystal
p.27
CZ Crystal Growth Development in Super Silicon Crystal Project
p.37
Gettering by Voids in Silicon: A Comparison with other Techniques
p.43
Gettering in Advanced Low Temperature Processes
p.53
Metal Gettering by Defective Regions in Carbon-Implanted Silicon
p.63

Silicon Wafer Technology: The Challenges towards the Gigabit Era

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Periodical:

Solid State Phenomena (Volumes 57-58)

Pages:

9-18

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.57-58.9

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Online since:

July 1997

Authors:

A.P. Mozer

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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