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Paper Titles
Preface
Design: New Material Challenge for Silicon ULSI
p.1
Silicon Wafer Technology: The Challenges towards the Gigabit Era
p.9
Hydrogen Annealed Silicon Wafer
p.19
Formation of Microscopic Distribution of Grown-In Defects in Czochralski Silicon Crystal
p.27
CZ Crystal Growth Development in Super Silicon Crystal Project
p.37
Gettering by Voids in Silicon: A Comparison with other Techniques
p.43
Gettering in Advanced Low Temperature Processes
p.53
Metal Gettering by Defective Regions in Carbon-Implanted Silicon
p.63

Preface

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Periodical:

Solid State Phenomena (Volumes 57-58)

Online since:

July 1997

Сopyright:

© 1997 Trans Tech Publications Ltd. All Rights Reserved

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