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HomeSolid State PhenomenaSolid State Phenomena Vols. 57-58Metallic Impurity Gettering in MeV Implanted Si

Metallic Impurity Gettering in MeV Implanted Si

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Gettering and Defect Engineering in Semiconductor Technology VII

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Periodical:

Solid State Phenomena (Volumes 57-58)

Pages:

69-74

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.57-58.69

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Online since:

July 1997

Authors:

O.V. Kononchuk, R.A. Brown, Sergei V. Koveshnikov, K.L. Beaman, F. Gonzalez, George A. Rozgonyi

Keywords:

Gettering, Metallic Impurity, MeV Ion Implantation, Silicon, SIMS

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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