Influence of Size and Density of Oxygen Precipitates of Internal Gettering Efficiency of Iron in Czochralski-Grown Silicon

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Periodical:

Solid State Phenomena (Volumes 57-58)

Edited by:

C. Claeys, J. Vanhellemont, H. Richter and M. Kittler

Pages:

75-80

DOI:

10.4028/www.scientific.net/SSP.57-58.75

Citation:

H. Takahashi et al., "Influence of Size and Density of Oxygen Precipitates of Internal Gettering Efficiency of Iron in Czochralski-Grown Silicon", Solid State Phenomena, Vols. 57-58, pp. 75-80, 1997

Online since:

July 1997

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$35.00

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