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Solid State Phenomena
Vols. 76-77
Solid State Phenomena
Vols. 73-75
Solid State Phenomena
Vol. 72
Solid State Phenomena
Vol. 71
Solid State Phenomena
Vols. 69-70
Solid State Phenomena
Vols. 67-68
Solid State Phenomena
Vols. 65-66
Solid State Phenomena
Vols. 63-64
Solid State Phenomena
Vols. 61-62
Solid State Phenomena
Vols. 59-60
Solid State Phenomena
Vols. 57-58
Solid State Phenomena
Vol. 56
Solid State Phenomena
Vol. 55

Solid State Phenomena Vols. 65-66

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.65-66

ToC:

Table of Contents

Paper Title Page

Characterization of Emitter Interface Oxide Growth in a Vertical LPCVD Polysilicon Deposition Reactor
Authors: M. Ramin, C. Hechtl, A. Haeusler
123
Nitride Strip: Phosphoric Acid Bath-Life above 100 Hours
Authors: C. Willis
127
Wet Metal Etching for Ti/Co Self-Aligned Silicides
Authors: S. O'Brien
131
Post-Titanium-Salicide Cleaning with Spray Technology
Authors: John Diedrick, A. Mauri, V. Nguyen
135
XPS Study of the Cleaning Efficiency by Ozone Processes of the Protective Films Formed by Reactive Ion Etching of Co and Ti Silicide
Authors: Thierry Conard, Stefan De Gendt, Mikhail R. Baklanov, Rita Vos, Marc Heyns, W. Vandervorst
139
Plasma Etch Residue and Photoresist Removal Utilizing Environmentally Benign Process Chemicals
Authors: W. Kleemeier, V. Leon, S. Graham
143
Angle Resolved XPS Characterization of the Formation of Cl and Br Bonds in Poly-Silicon Etching and Its Cleaning
Authors: Y.B. Kim, B. Beckx, Serge Vanhaelemeersch, W. Vandervorst
153
Dynamics of Mass Transfer on a Wafer Surface in Ozonated-Water Processing for Photoresist Removal
Authors: Natraj Narayanswami, S. Nelson
157
Construction of the Distribution System for Ozonized Water Used in the Wet Cleaning of Si Wafer Surface
Authors: Osamu Nakamura, M. Yoshida, Yasuharu Shirai, Masakazu Nagase, Michio Kitano, M. Gozyuki, Yukio Hashimoto, Tadahiro Ohmi
161
A Novel Resist and Post-Etch Residue Removal Process Using Ozonated Chemistry
Authors: Stefan De Gendt, P. Snee, I. Cornelissen, Marcel Lux, Rita Vos, Paul W. Mertens, D. Martin Knotter, M.M. Meuris, Marc Heyns
165

Showing 31 to 40 of 71 Paper Titles

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