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HomeSolid State PhenomenaSolid State Phenomena Vols. 65-66Nitride Strip: Phosphoric Acid Bath-Life above 100...

Nitride Strip: Phosphoric Acid Bath-Life above 100 Hours

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Ultra Clean Processing of Silicon Surfaces IV

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Periodical:

Solid State Phenomena (Volumes 65-66)

Pages:

127-130

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.65-66.127

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Online since:

November 1998

Authors:

C. Willis

Keywords:

H₃PO₄

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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