Wet Metal Etching for Ti/Co Self-Aligned Silicides

Abstract:

Article Preview

Info:

Periodical:

Solid State Phenomena (Volumes 65-66)

Edited by:

Marc Heyns, Marc Meuris and Paul Mertens

Pages:

131-134

DOI:

10.4028/www.scientific.net/SSP.65-66.131

Citation:

S. O'Brien "Wet Metal Etching for Ti/Co Self-Aligned Silicides", Solid State Phenomena, Vols. 65-66, pp. 131-134, 1999

Online since:

November 1998

Authors:

Export:

Price:

$35.00

In order to see related information, you need to Login.