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HomeSolid State PhenomenaSolid State Phenomena Vols. 65-66Evaluation of Cleaning Recipes Based on Ozonated...

Evaluation of Cleaning Recipes Based on Ozonated Water for Pre-Gate Oxide Cleaning

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Periodical:

Solid State Phenomena (Volumes 65-66)

Pages:

119-122

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.65-66.119

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Online since:

November 1998

Authors:

Joong S. Jeon, Bob Ogle, M. Baeyens, Paul W. Mertens

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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