Applications of Tetramethylammoninium Hydroxide (TMAH) as a Post Tungsten CMP Cleaning Mixture

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Periodical:

Solid State Phenomena (Volumes 65-66)

Edited by:

Marc Heyns, Marc Meuris and Paul Mertens

Pages:

105-108

DOI:

10.4028/www.scientific.net/SSP.65-66.105

Citation:

M. Jolley "Applications of Tetramethylammoninium Hydroxide (TMAH) as a Post Tungsten CMP Cleaning Mixture", Solid State Phenomena, Vols. 65-66, pp. 105-108, 1999

Online since:

November 1998

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