Characterization of the Post Dry Etch Cleaning of the Silicon Surface Prior to Silicon Epitaxial Growth

Abstract:

Article Preview

Info:

Periodical:

Solid State Phenomena (Volumes 65-66)

Edited by:

Marc Heyns, Marc Meuris and Paul Mertens

Pages:

97-100

DOI:

10.4028/www.scientific.net/SSP.65-66.97

Citation:

Y.B. Kim et al., "Characterization of the Post Dry Etch Cleaning of the Silicon Surface Prior to Silicon Epitaxial Growth", Solid State Phenomena, Vols. 65-66, pp. 97-100, 1999

Online since:

November 1998

Export:

Price:

$35.00

In order to see related information, you need to Login.