Ultra-Thin Oxide Growth on Silicon Using Ozonated Solutions
p.81
p.81
Gas-Phase Surface Processing Prior to 3.2 nm Gate Oxidation
p.85
p.85
Post Dry-Etch Cleaning Issues of an Organic Low-K Dielectric
p.89
p.89
Vapor Phase Decomposition - Droplet Collection: Can we Improve the Collection Efficiency for Copper Contamination?
p.93
p.93
Characterization of the Post Dry Etch Cleaning of the Silicon Surface Prior to Silicon Epitaxial Growth
p.97
p.97
Silicon Contamination Prevention in HF Mixtures
p.101
p.101
Applications of Tetramethylammoninium Hydroxide (TMAH) as a Post Tungsten CMP Cleaning Mixture
p.105
p.105
Fe and Cu Removal Efficiency in HF-DIW/O3 Cleaning Sequence
p.109
p.109
Post Polysilicon Etch (Incorporating DUV Resist an BARC) Polymer Cleaning
p.113
p.113
Characterization of the Post Dry Etch Cleaning of the Silicon Surface Prior to Silicon Epitaxial Growth
Abstract:
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Info:
Periodical:
Solid State Phenomena (Volumes 65-66)
Pages:
97-100
Citation:
Online since:
November 1998
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Сopyright:
© 1999 Trans Tech Publications Ltd. All Rights Reserved
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