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HomeSolid State PhenomenaSolid State Phenomena Vols. 65-66Ultra-Thin Oxide Growth on Silicon Using Ozonated...

Ultra-Thin Oxide Growth on Silicon Using Ozonated Solutions

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Abstract:

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Ultra Clean Processing of Silicon Surfaces IV

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Periodical:

Solid State Phenomena (Volumes 65-66)

Pages:

81-84

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.65-66.81

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Online since:

November 1998

Authors:

F. De Smedt, Chris Vinckier, I. Cornelissen, Stefan De Gendt, Marc Meuris, G. Gilis, Marc Heyns

Keywords:

Oxidation, Ozone

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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