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HomeSolid State PhenomenaSolid State Phenomena Vols. 65-66Potassium Adhesion to Various CVD Oxide and the...

Potassium Adhesion to Various CVD Oxide and the Surface Cleaning with Hot UPW

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Abstract:

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Ultra Clean Processing of Silicon Surfaces IV

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Periodical:

Solid State Phenomena (Volumes 65-66)

Pages:

67-70

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.65-66.67

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Online since:

November 1998

Authors:

T. Jizaimaru, H. Kanetaka, S. Omae, Tadahiro Ohmi

Keywords:

Annealing, K (Potassium), SiO₂

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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