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HomeSolid State PhenomenaSolid State Phenomena Vols. 65-66Ozonated DI-Water for Clean Chemical Oxide Growth

Ozonated DI-Water for Clean Chemical Oxide Growth

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Ultra Clean Processing of Silicon Surfaces IV

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Periodical:

Solid State Phenomena (Volumes 65-66)

Pages:

77-80

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.65-66.77

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Online since:

November 1998

Authors:

I. Cornelissen, Marc Meuris, K. Wolke, M. Wikol, Lee M. Loewenstein, G. Doumen, Marc Heyns

Keywords:

DI Water, Ozone, Solubility

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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