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HomeSolid State PhenomenaSolid State Phenomena Vols. 65-66Post-Titanium-Salicide Cleaning with Spray...

Post-Titanium-Salicide Cleaning with Spray Technology

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Abstract:

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Ultra Clean Processing of Silicon Surfaces IV

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Periodical:

Solid State Phenomena (Volumes 65-66)

Pages:

135-138

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.65-66.135

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Online since:

November 1998

Authors:

John Diedrick, A. Mauri, V. Nguyen

Keywords:

SC-1 Clean, Spray Technology, Titanium-Salicide

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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