Evaluation of Post Metal Etch Cleaning by Analyzing the Chemical Compositions and Distributions on the Etched Al Surface

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Periodical:

Solid State Phenomena (Volumes 65-66)

Edited by:

Marc Heyns, Marc Meuris and Paul Mertens

Pages:

177-180

DOI:

10.4028/www.scientific.net/SSP.65-66.177

Citation:

H. L. Li et al., "Evaluation of Post Metal Etch Cleaning by Analyzing the Chemical Compositions and Distributions on the Etched Al Surface", Solid State Phenomena, Vols. 65-66, pp. 177-180, 1999

Online since:

November 1998

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Price:

$35.00

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