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HomeSolid State PhenomenaSolid State Phenomena Vols. 65-66Industrial Trends in Wet Processing Technology

Industrial Trends in Wet Processing Technology

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Abstract:

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Ultra Clean Processing of Silicon Surfaces IV

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Periodical:

Solid State Phenomena (Volumes 65-66)

Pages:

31-34

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.65-66.31

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Online since:

November 1998

Authors:

L.F.Tz. Kwakman, M. Geomini, Didier Lévy, D. Malgouyres

Keywords:

Equipment Utilization Rate, HF/Ozone Cleaning, Single/Dual Tank Immersion Tools

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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