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HomeSolid State PhenomenaSolid State Phenomena Vols. 65-66The Electrochemical Kinetics of Silicon Surface...

The Electrochemical Kinetics of Silicon Surface Corrosion in HF Containing Dilute Solutions

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Ultra Clean Processing of Silicon Surfaces IV

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Periodical:

Solid State Phenomena (Volumes 65-66)

Pages:

39-42

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.65-66.39

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Online since:

November 1998

Authors:

V. Bertagna, F. Rouelle, R. Erre, M. Chemla

Keywords:

HF, Passivation, Silicon

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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