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HomeSolid State PhenomenaSolid State Phenomena Vols. 67-68Deposition of Microcrystalline Silicon Films by...

Deposition of Microcrystalline Silicon Films by Magnetron Sputtering

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Abstract:

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Polycrystalline Semiconductors V

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Periodical:

Solid State Phenomena (Volumes 67-68)

Pages:

107-112

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.67-68.107

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Online since:

April 1999

Authors:

M. Tzolov, Y. Jeliazova, Reinhard Carius, L. Houben, F. Finger, N. Tzenov

Keywords:

Growth Process, Magnetron Sputtering, Microcrystalline Silicon, Raman Scattering

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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