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HomeSolid State PhenomenaSolid State Phenomena Vols. 67-68Low-Temperature Deposition of Microcrystalline...

Low-Temperature Deposition of Microcrystalline Silicon by Microwave Plasma-Enhanced Sputtering

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Polycrystalline Semiconductors V

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Periodical:

Solid State Phenomena (Volumes 67-68)

Pages:

119-124

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.67-68.119

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Online since:

April 1999

Authors:

P. Müller, W.M. Holber, W. Henrion, E. Nebauer, Viktor Schlosser, B. Selle, Irina Sieber, W. Fuhs

Keywords:

Electron Cyclotron Resonance Plasma, Silicon, Sputtering

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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