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HomeSolid State PhenomenaSolid State Phenomena Vols. 67-68Thin Films Hydrogenated Silicon Deposited by...

Thin Films Hydrogenated Silicon Deposited by Direct Current Magnetron Sputtering at High Rate

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Abstract:

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Polycrystalline Semiconductors V

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Periodical:

Solid State Phenomena (Volumes 67-68)

Pages:

113-118

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.67-68.113

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Online since:

April 1999

Authors:

R. Cherfi, G. Farhi, M. Aoucher

Keywords:

Conductivity, Deposition, Optical Absorption, Photoconductivity, Silicon, Sputtering

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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