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HomeSolid State PhenomenaSolid State Phenomena Vols. 67-68Fine-Crystalline Silicon Grown at Low...

Fine-Crystalline Silicon Grown at Low Temperatures: Investigations by High-Resolution Microscopy

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Abstract:

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Polycrystalline Semiconductors V

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Periodical:

Solid State Phenomena (Volumes 67-68)

Pages:

211-216

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.67-68.211

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Online since:

April 1999

Authors:

Ch. Ross, J. Herion, L. Houben, Reinhard Carius, H. Wagner

Keywords:

Atomic Force Microscope (AFM), Plasma-Enhanced Chemical Vapour Deposition, Scanning Tunneling Microscopy

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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