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HomeSolid State PhenomenaSolid State Phenomena Vols. 67-68Study of Polysilicon Produced by Solid Phase...

Study of Polysilicon Produced by Solid Phase Crystallization of Hydrogenated Amorphous Silicon Deposited at High Rate

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Abstract:

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Polycrystalline Semiconductors V

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Periodical:

Solid State Phenomena (Volumes 67-68)

Pages:

217-222

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.67-68.217

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Online since:

April 1999

Authors:

G. Farhi, M. Aoucher, T. Mohammed-Brahim

Keywords:

Conductance, Crystallization, Photoconductance, Thermal Annealing

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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