Properties of Poly-Si Obtained by Solid Phase Crystallization of Differently Produced a:Si:H Thin Films
p.199
p.199
Transmission Electron Microscopy and Raman Analysis of the Crystallisation Process of a-Si on Glass for Low Seed Density
p.205
p.205
Fine-Crystalline Silicon Grown at Low Temperatures: Investigations by High-Resolution Microscopy
p.211
p.211
Study of Polysilicon Produced by Solid Phase Crystallization of Hydrogenated Amorphous Silicon Deposited at High Rate
p.217
p.217
Polycrystalline Silicon Films Produced by Low Pressure Chemical Vapour Deposition for Microswitch Applications: The Stress as Dependent on Deposition Conditions, Doping Type, and Thermal Treatments
p.223
p.223
Ultrathin Quasi-Monocrystalline Silicon Films for Electronic Devices
p.229
p.229
Atomic Layer Deposition of ZnO Films and Their Application to Solar Cells
p.237
p.237
Properties of Transparent Conducting Indium Tin Oxide Films Deposited by Reactive e-Beam Evaporation on Heated Glass
p.249
p.249
Large Area Device Quality Indium-Tin-Oxide Thin Films by Magnetron Sputterting
p.255
p.255
Polycrystalline Silicon Films Produced by Low Pressure Chemical Vapour Deposition for Microswitch Applications: The Stress as Dependent on Deposition Conditions, Doping Type, and Thermal Treatments
Abstract:
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Periodical:
Solid State Phenomena (Volumes 67-68)
Pages:
223-228
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Online since:
April 1999
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© 1999 Trans Tech Publications Ltd. All Rights Reserved
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