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HomeSolid State PhenomenaSolid State Phenomena Vols. 67-68Large Area Device Quality Indium-Tin-Oxide Thin...

Large Area Device Quality Indium-Tin-Oxide Thin Films by Magnetron Sputterting

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Polycrystalline Semiconductors V

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Periodical:

Solid State Phenomena (Volumes 67-68)

Pages:

255-260

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.67-68.255

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Online since:

April 1999

Authors:

P. Thilakan, E. Terzini, G. Nobile, S. Loreti, C. Minarini, T. Polichetti, G. Sasikala

Keywords:

Crystal Structure, Magnetron Sputtering, Thin Film

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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