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HomeSolid State PhenomenaSolid State Phenomena Vols. 67-68Impurity Effect on the Dislocation DLTS Spectrum...

Impurity Effect on the Dislocation DLTS Spectrum in Silicon

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Abstract:

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Polycrystalline Semiconductors V

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Periodical:

Solid State Phenomena (Volumes 67-68)

Pages:

27-32

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.67-68.27

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Online since:

April 1999

Authors:

Olga V. Feklisova, G. Mariani-Regula, Bernard Pichaud, Eugene B. Yakimov

Keywords:

Deep Level Transient Spectroscopy, Dislocation, Metal, Oxygen, Silicon

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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