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HomeSolid State PhenomenaSolid State Phenomena Vols. 69-70Pre-Cavities Defect Distribution in He Implanted...

Pre-Cavities Defect Distribution in He Implanted Silicon Studied by Slow Positron Beam

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Gettering and Defect Engineering in Semiconductor Technology VIII

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Periodical:

Solid State Phenomena (Volumes 69-70)

Pages:

385-390

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.69-70.385

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Online since:

August 1999

Authors:

Roberto S. Brusa, Grzegorz P. Karwasz, Antonio Zecca, F. Corni, R. Tonini, G. Ottaviani

Keywords:

Bubble, Cavity, Defects in Si, He, Positron

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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