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HomeSolid State PhenomenaSolid State Phenomena Vols. 76-77Surface Characterization after Different Wet...

Surface Characterization after Different Wet Chemical Cleans

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Abstract:

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Ultra Clean Processing of Silicon Surfaces V

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Periodical:

Solid State Phenomena (Volumes 76-77)

Pages:

67-70

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.76-77.67

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Online since:

January 2001

Authors:

Martine Claes, Erika Röhr, Thierry Conard, F. De Smedt, Stefan De Gendt, W. Storm, T. Bauer, Paul W. Mertens, Marc Heyns

Keywords:

Ozone Cleaning, Surface Characterization, ToF-SIMS, X-Ray Photoelectron Spectroscopy (XPS)

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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