Materials Compatibility and Organic Build-Up during Ozone-Based Cleaning of Semiconductor Devices

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Periodical:

Solid State Phenomena (Volumes 76-77)

Edited by:

Marc Heyns, Marc Meuris and Paul Mertens

Pages:

63-66

DOI:

10.4028/www.scientific.net/SSP.76-77.63

Citation:

F. De Smedt et al., "Materials Compatibility and Organic Build-Up during Ozone-Based Cleaning of Semiconductor Devices", Solid State Phenomena, Vols. 76-77, pp. 63-66, 2001

Online since:

January 2001

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$35.00

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