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HomeSolid State PhenomenaSolid State Phenomena Vols. 76-77Electrochemical Study for the Characterization of...

Electrochemical Study for the Characterization of Wet Silicon Oxide Surfaces

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Ultra Clean Processing of Silicon Surfaces V

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Periodical:

Solid State Phenomena (Volumes 76-77)

Pages:

81-84

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.76-77.81

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Online since:

January 2001

Authors:

V. Bertagna, R. Erre, F. Rouelle, M. Chemla, Sébastien Petitdidier, Didier Lévy

Keywords:

Impedance, Oxide, Silicon

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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