Rapid Diffusion of Titanium along Grain Boundaries in Polysilicon during Electron Beam Evaporation

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Periodical:

Solid State Phenomena (Volumes 78-79)

Edited by:

H. Tomokage and T. Sekiguchi

Pages:

281-288

DOI:

10.4028/www.scientific.net/SSP.78-79.281

Citation:

K. Yokota et al., "Rapid Diffusion of Titanium along Grain Boundaries in Polysilicon during Electron Beam Evaporation", Solid State Phenomena, Vols. 78-79, pp. 281-288, 2001

Online since:

April 2001

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$35.00

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