Development of an Ultra-Precision Positioner and its Applications

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Periodical:

Solid State Phenomena (Volumes 78-79)

Edited by:

H. Tomokage and T. Sekiguchi

Pages:

413-418

DOI:

10.4028/www.scientific.net/SSP.78-79.413

Citation:

Y. Egashira et al., "Development of an Ultra-Precision Positioner and its Applications", Solid State Phenomena, Vols. 78-79, pp. 413-418, 2001

Online since:

April 2001

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Price:

$35.00

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