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HomeSolid State PhenomenaSolid State Phenomena Vols. 80-81Low-Temperature Plasma-Processed Microcrystalline...

Low-Temperature Plasma-Processed Microcrystalline Silicon Thin Films for Large-Area Electronics

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Abstract:

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Polycrystalline Semiconductors VI

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Periodical:

Solid State Phenomena (Volumes 80-81)

Pages:

361-366

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.80-81.361

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Online since:

November 2001

Authors:

Pere Roca i Cabarrocas, Surendra Kumar, V. Tripathi, P. Bulkin, R. Brenot, B. Drévillon, R. Vanderhaghen, I. French

Keywords:

Microcrystalline Silicon, Plasma Deposition, Stability, Thin Film Transistor

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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