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HomeSolid State PhenomenaSolid State Phenomena Vols. 80-81Porous Silicon in Microsystems: Thermal Isolation...

Porous Silicon in Microsystems: Thermal Isolation Applications

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Abstract:

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Polycrystalline Semiconductors VI

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Periodical:

Solid State Phenomena (Volumes 80-81)

Pages:

417-428

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.80-81.417

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Online since:

November 2001

Authors:

S. Périchon, Vladimir Lysenko, B. Remaki, Daniel Barbier

Keywords:

Microsystems, Porous Silicon (PS), Thermal Conductivity (TC)

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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