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HomeSolid State PhenomenaSolid State Phenomena Vols. 80-81Manufacturing of Precise SiC Components by Nd:YAG...

Manufacturing of Precise SiC Components by Nd:YAG Laser Radiation

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Abstract:

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Polycrystalline Semiconductors VI

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Periodical:

Solid State Phenomena (Volumes 80-81)

Pages:

441-446

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.80-81.441

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Online since:

November 2001

Authors:

E.W. Kreutz, R. Weichenhain, A. Horn, R. Poprawe

Keywords:

Micro Machining, Microstructure, RAMAN, Silicon Carbide (SiC), X-Ray Photoelectron Spectroscopy (XPS)

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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