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HomeSolid State PhenomenaSolid State Phenomena Vols. 80-81Thin-Film Microelectromechanical Devices on...

Thin-Film Microelectromechanical Devices on Large-Area Substrates

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Abstract:

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Polycrystalline Semiconductors VI

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Periodical:

Solid State Phenomena (Volumes 80-81)

Pages:

429-440

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.80-81.429

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Online since:

November 2001

Authors:

Virginia Chu, João Pedro Conde, Mário Boucinha, João Gaspar, Pedro Brogueira

Keywords:

Actuation, Microelectromechanical, Resonance, Thin Film, Thin Film Transistor

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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