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HomeSolid State PhenomenaSolid State Phenomena Vols. 82-84Segregation of Mg Implanted into InAs: Influence...

Segregation of Mg Implanted into InAs: Influence of the Internal Elastic Stresses

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Periodical:

Solid State Phenomena (Volumes 82-84)

Pages:

569-574

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.82-84.569

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Online since:

November 2001

Authors:

Oleg Velichko, V.A. Dobrushkin, A.K. Fedotov, V.A. Tsurko

Keywords:

Diffusion, Elastic Stress, Indium Arsenide, Magnesium, Segregation

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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