Kinetics of Surface Processes and Mechanisms of Alloy Intermixing Near Interfaces in Si(Ge)/Si1-xGex Structures Grown by Molecular Beam Epitaxy with Combined Sources

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Periodical:

Solid State Phenomena (Volumes 82-84)

Edited by:

V. Raineri, F. Priolo, M. Kittler and H. Richter

Pages:

551-556

DOI:

10.4028/www.scientific.net/SSP.82-84.551

Citation:

L.K. Orlov and N.L. Ivina, "Kinetics of Surface Processes and Mechanisms of Alloy Intermixing Near Interfaces in Si(Ge)/Si1-xGex Structures Grown by Molecular Beam Epitaxy with Combined Sources", Solid State Phenomena, Vols. 82-84, pp. 551-556, 2002

Online since:

November 2001

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$35.00

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