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HomeSolid State PhenomenaSolid State Phenomena Vols. 82-84Kinetics of Surface Processes and Mechanisms of...

Kinetics of Surface Processes and Mechanisms of Alloy Intermixing Near Interfaces in Si(Ge)/Si_1-xGe_x Structures Grown by Molecular Beam Epitaxy with Combined Sources

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Periodical:

Solid State Phenomena (Volumes 82-84)

Pages:

551-556

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.82-84.551

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Online since:

November 2001

Authors:

L.K. Orlov, N.L. Ivina

Keywords:

Composition Profile, Growth Kinetic, Heteroepitaxy, Interface, Pyrolysis, Segregation, SiGe Solid Solution

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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