Effects of Pulsed Electron Beam Annealing on Radiation Damage in N Doped a-SiC:H Films Deposited by PECVD

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Periodical:

Solid State Phenomena (Volumes 82-84)

Edited by:

V. Raineri, F. Priolo, M. Kittler and H. Richter

Pages:

529-532

DOI:

10.4028/www.scientific.net/SSP.82-84.529

Citation:

J. Huran et al., "Effects of Pulsed Electron Beam Annealing on Radiation Damage in N Doped a-SiC:H Films Deposited by PECVD", Solid State Phenomena, Vols. 82-84, pp. 529-532, 2002

Online since:

November 2001

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$35.00

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