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HomeSolid State PhenomenaSolid State Phenomena Vols. 82-84Properties of Silicon Film in a Silicon-on-Glass...

Properties of Silicon Film in a Silicon-on-Glass Structure

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Periodical:

Solid State Phenomena (Volumes 82-84)

Pages:

503-508

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.82-84.503

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Online since:

November 2001

Authors:

D.V. Kilanov, I.V. Antonova, L.N. Safronov, V.P. Popov, V.I. Obodnikov, E.V. Spesivtsev

Keywords:

Anodic Bonding, Electrical Properties, Silicon-on-Glass

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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