Existence of an Epitaxially Ordered Phase in the Buried Oxide of SIMOX Wafers

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Periodical:

Solid State Phenomena (Volumes 82-84)

Edited by:

V. Raineri, F. Priolo, M. Kittler and H. Richter

Pages:

485-490

DOI:

10.4028/www.scientific.net/SSP.82-84.485

Citation:

T. Shimura et al., "Existence of an Epitaxially Ordered Phase in the Buried Oxide of SIMOX Wafers", Solid State Phenomena, Vols. 82-84, pp. 485-490, 2002

Online since:

November 2001

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$35.00

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