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HomeSolid State PhenomenaSolid State Phenomena Vols. 82-84Structural and Photoluminescence Properties of H+...

Structural and Photoluminescence Properties of H⁺ Ion-Implanted Silicon-on-Insulator Structures Formed by Hydrogen Slicing

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Periodical:

Solid State Phenomena (Volumes 82-84)

Pages:

509-514

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.82-84.509

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Online since:

November 2001

Authors:

Ida E. Tyschenko, A.B. Talochkin, K.S. Zhuravlev, V.I. Obodnikov, V.P. Popov

Keywords:

Hydrogen Ions, Silicon Nanocrystals, Silicon-on-Insulator (SOI), Visible Photoluminescence

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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