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HomeSolid State PhenomenaSolid State Phenomena Vols. 82-84Hydrogen-Induced Shallow Donors in Silicon and...

Hydrogen-Induced Shallow Donors in Silicon and Silicon-on-Insulator Structures Formed by Hydrogen Slicing

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Periodical:

Solid State Phenomena (Volumes 82-84)

Pages:

497-502

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.82-84.497

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Online since:

November 2001

Authors:

V.P. Popov, D.V. Kilanov, I.V. Antonova, O.V. Naumova, A.P. Stepovik, V.T. Gromov, Andrzej Misiuk

Keywords:

Helium Co-Implantation, Hydrogen and Defect-Induced Shallow Donor HDD, Hydrogen Co-Implantation, Silicon, SOI, Thermal Annealing under High Hydrostatic Pressure

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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