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HomeSolid State PhenomenaSolid State Phenomena Vols. 82-84Impact of High-Energy Particle Irradiation on...

Impact of High-Energy Particle Irradiation on Polycrystalline Silicon Films

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Gettering and Defect Engineering in Semiconductor Technology IX

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Periodical:

Solid State Phenomena (Volumes 82-84)

Pages:

471-476

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.82-84.471

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Online since:

November 2001

Authors:

Masashi Nakabayashi, H. Ohyama, Eddy Simoen, Cor Claeys, K. Tanaka, K. Kobayashi, K. Miyahara

Keywords:

Induced Electron Capture Levels, InGaP/InGaAs p-HEMT, Non-Ionizing Energy Loss, Number of Knock-on Atoms, Radiation Damage

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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