Local Electrical Properties of Non-Doped Polycrystalline Silicon Thin-Films Evaluated Using Conductive Atomic Force Microscopy

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Periodical:

Solid State Phenomena (Volume 93)

Edited by:

T. Fuyuki, T. Sameshima, H.P. Strunk and J.H. Werner

Pages:

339-344

DOI:

10.4028/www.scientific.net/SSP.93.339

Citation:

Y. Aya et al., "Local Electrical Properties of Non-Doped Polycrystalline Silicon Thin-Films Evaluated Using Conductive Atomic Force Microscopy ", Solid State Phenomena, Vol. 93, pp. 339-344, 2003

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June 2003

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$35.00

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