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HomeSolid State PhenomenaSolid State Phenomena Vol. 93Formation of Extended Defects in Polycrystalline...

Formation of Extended Defects in Polycrystalline SiGe by Electron Irradiation

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Polycrystalline Semiconductors VII

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Periodical:

Solid State Phenomena (Volume 93)

Pages:

361-366

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.93.361

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Online since:

June 2003

Authors:

J. Kikkawa, J. Yamasaki, Y. Ohno, Masanori Kohyama, S. Takeda

Keywords:

{113} Defects, Electron Irradiation, Interstitial, Silicon, Silicon Germanium

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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