Fabrication and Characterization of Ultra-Small Polycrystalline Silicon Islands for Advanced Multi-Level Silicon-On-Insulator Applications

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Periodical:

Solid State Phenomena (Volume 93)

Edited by:

T. Fuyuki, T. Sameshima, H.P. Strunk and J.H. Werner

Pages:

441-446

DOI:

10.4028/www.scientific.net/SSP.93.441

Citation:

D. Schmidt and P. Pianetta, "Fabrication and Characterization of Ultra-Small Polycrystalline Silicon Islands for Advanced Multi-Level Silicon-On-Insulator Applications ", Solid State Phenomena, Vol. 93, pp. 441-446, 2003

Online since:

June 2003

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$35.00

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