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HomeSolid State PhenomenaSolid State Phenomena Vol. 93Fabrication and Characterization of Ultra-Small...

Fabrication and Characterization of Ultra-Small Polycrystalline Silicon Islands for Advanced Multi-Level Silicon-On-Insulator Applications

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Polycrystalline Semiconductors VII

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Periodical:

Solid State Phenomena (Volume 93)

Pages:

441-446

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.93.441

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Online since:

June 2003

Authors:

Dominik Schmidt, Piero Pianetta

Keywords:

Absorption, Annealing, Islands, Polycrystalline Silicon, Single Crystal

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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